JPH0317210Y2 - - Google Patents

Info

Publication number
JPH0317210Y2
JPH0317210Y2 JP13173680U JP13173680U JPH0317210Y2 JP H0317210 Y2 JPH0317210 Y2 JP H0317210Y2 JP 13173680 U JP13173680 U JP 13173680U JP 13173680 U JP13173680 U JP 13173680U JP H0317210 Y2 JPH0317210 Y2 JP H0317210Y2
Authority
JP
Japan
Prior art keywords
light
scale
mode
diffracted light
specific mode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13173680U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5761513U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13173680U priority Critical patent/JPH0317210Y2/ja
Publication of JPS5761513U publication Critical patent/JPS5761513U/ja
Application granted granted Critical
Publication of JPH0317210Y2 publication Critical patent/JPH0317210Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP13173680U 1980-09-18 1980-09-18 Expired JPH0317210Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13173680U JPH0317210Y2 (en]) 1980-09-18 1980-09-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13173680U JPH0317210Y2 (en]) 1980-09-18 1980-09-18

Publications (2)

Publication Number Publication Date
JPS5761513U JPS5761513U (en]) 1982-04-12
JPH0317210Y2 true JPH0317210Y2 (en]) 1991-04-11

Family

ID=29492005

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13173680U Expired JPH0317210Y2 (en]) 1980-09-18 1980-09-18

Country Status (1)

Country Link
JP (1) JPH0317210Y2 (en])

Also Published As

Publication number Publication date
JPS5761513U (en]) 1982-04-12

Similar Documents

Publication Publication Date Title
JP3210111B2 (ja) 変位検出装置
US4677293A (en) Photoelectric measuring system
US4933673A (en) Encoder
JP2862417B2 (ja) 変位測定装置及び方法
JPH06229781A (ja) 変位測定装置
JPH06194123A (ja) 変位検出装置
US4577101A (en) Shaft encoder with an optical system comprising two straight-line-generatrix surfaces
JP2560513B2 (ja) 回析干渉型エンコーダ
JPH0317210Y2 (en])
JP2002243503A (ja) 光学式エンコーダ
JP4473975B2 (ja) エンコーダ
JPS6128923B2 (en])
JP3198789B2 (ja) 光学式エンコーダ
JPH05256666A (ja) ロータリーエンコーダー
JPS6122243Y2 (en])
JP3500214B2 (ja) 光学式エンコーダ
JPS6234246Y2 (en])
JPS6244332Y2 (en])
JPS6210641Y2 (en])
JPS6139289Y2 (en])
JPH10103917A (ja) 位置計測装置
JP3501529B2 (ja) 光学式変位測定装置
JPS6234243Y2 (en])
JP2688988B2 (ja) 光学式測定装置
WO2016143694A1 (ja) 反射型エンコーダ